ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes.
The LR/HR series has excellent reliability in sublimate generating processes such as SiN-LPCVD and metal etching, etc.
Various ULVAC vacuum pumps are shown based on operating pressure range.
(Operating pressure range varies depending on the model.)
Please choose a unit of pressure [Pa] [Torr] [mbar].
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