Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in the hard processes of CVD, etching etc. In the light processes, approximately up to 70% of electric power consumption reduction is possible by having the ECHO-SHOCK on the pump. CE marking is available for all series (optional).

Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in the hard processes of CVD, etching etc. In the light processes, approximately up to 70% of electric power consumption reduction is possible by having the ECHO-SHOCK on the pump. CE marking is available for all series (optional).