A complete line of turbo molecular pumps are available from ULVAC. ULVAC’s turbo molecular pump meets a broad range of vacuum applications. From simple vacuum generation for analytical instrumentation, to the demanding pumping requirements encountered in corrosive processes for the semiconductor industry.
ULVAC's UTM Series of turbo molecular pumps use high-performance bearings unlike those in common use, enabling outstanding features.
ULVAC's UTM-FW/FH Series of turbo molecular pumps use digitally-controlled magnetic levitation to achieve superior features such as high functionality and energy-savings. The wide variety of models in each series can be used for several different processes. The FW Series is for wide range and high throughput. The FH Series is for high back-pressures and high compression.
The YTP Series are simple high-vacuum evacuation units that consist of an ULVAC turbo molecular pump (UTM Series pump), rotary pump, forevalve, Pirani vacuum gauge and control system. A single unit can evacuate from atmospheric pressure down to high vacuums.
