MESEC SAT-3000 (standalone type) MESEC BIT-2000 / 3000 (built-in types) In semiconductor interconnect processes, the film thickness distribution is important for quality control of metal thin films deposited on wafers. This film thickness distribution affects device characteristics and yield. MESEC can measure film thickness directly on the product wafer, providing more reliable evaluation results and reducing monitor wafers.

UNECS-2000 is based on the Spectroscopic ellipsometry by utilizing the high-order retarders. It is the newest spectroscopic ellipsometer, which realized the high-speed and has a compact size. It has an excellent cost performance, which was impossible by the conventional spectroscopic ellipsometer. Its motorized stage can measure the sample up to the size of φ200mm . Users can use it very easily to get high accurate measurement results. It can be used for various applications such as R&D purposes and manufacturing lines etc.

UNECS-3000A is high-speed spectroscopic ellipsometer that is quickly appreciable for thickness and optical parameter distribution of thin film by snap shot measurement and automated mapping function. Users can use it very easily to get high accurate measurement results. It can be used for various applications such as R&D purposes and manufacturing lines etc.