ULVAC offers a non-contact metal film thickness measurement system, compact high-speed spectroscopic ellipsometer, multi-probe evaluation system, local efficiency/haze measurement system, surface profile and resistivity measurement systems.
The "MPEC-opt1300" local efficiency/haze measurement system for tandem type thin-film solar cells uses a newly developed mini-cell forming function (patented) with a laser, to form mini-cells without cutting the substrate and evaluate the efficiency distribution. Moreover, with recipe settings allowing the system to automatically perform everything from mini-cell formation to distribution measurement and mapping display, although the evaluation of 7 points on the substrate by the conventional manual method took 65 minutes, the system can shorten this to 8 minutes, 1/8 of the previous time. As well as handling conventional evaluation substrates, the system can handle normal module substrates. This makes it possible to perform evaluations directly from the production line or compare evaluation results with results from a solar simulator used for line inspection.
The Multi-Probe Evaluation of Thin-Film Characterization System for tandem type solar cell, MPEC-1300, which is compatible with the 5.5th-generation substrate size used as standard for thin-film silicone solar cells, is a breakthrough evaluation system that can evaluate not only a-Si thin films but also the µc-Si crystallinity of tandem type thin-film solar cells, which is achieved by providing a function that can evaluate optical characteristics in addition to the conventional measurement of deposition thickness, surface shapes, and resistance.
MESEC SAT-3000 (standalone type) MESEC BIT-2000 / 3000 (built-in types) In semiconductor interconnect processes, the film thickness distribution is important for quality control of metal thin films deposited on wafers. This film thickness distribution affects device characteristics and yield. MESEC can measure film thickness directly on the product wafer, providing more reliable evaluation results and reducing monitor wafers.
UNECS-2000 is based on the Spectroscopic ellipsometry by utilizing the high-order retarders. It is the newest spectroscopic ellipsometer, which realized the high-speed and has a compact size. It has an excellent cost performance, which was impossible by the conventional spectroscopic ellipsometer. Its motorized stage can measure the sample up to the size of φ200mm . Users can use it very easily to get high accurate measurement results. It can be used for various applications such as R&D purposes and manufacturing lines etc.
UNECS-3000A is high-speed spectroscopic ellipsometer that is quickly appreciable for thickness and optical parameter distribution of thin film by snap shot measurement and automated mapping function. Users can use it very easily to get high accurate measurement results. It can be used for various applications such as R&D purposes and manufacturing lines etc.