In the manufacturing processes of solar cell panels, CVD systems, which are used to produce power generation layers, and sputtering systems, used to form electrodes, are particularly important because they are directly associated with the performance of the panels.

These CVD systems and sputtering systems consist of ULVAC's components. Vacuum gauges (G-TRAN series) have been developed to achieve the centralization of process control of the systems and downsizing. They consist of three basic units, which are a sensor unit, a box unit, and a display unit, and the respective units can be combined depending on the application.

Our dry pumps (LR/HR series) feature improved maintainability and reduced noise, and are highly durable in hard processes such as CVD and etching. In addition, they allow a reduction of up to approximately 70% in power consumption in combination with ECO-SHOCK in light processes and are indispensable for a large system equipped with a pumping system using two or more pumps.