ULVAC VACUUM >  Vacuum technology for the solar cell industry

In the manufacturing processes of solar cell panels, CVD systems, which are used to produce power generation layers, and sputtering systems, used to form electrodes, are particularly important because they are directly associated with the performance of the panels.

These CVD systems and sputtering systems consist of ULVAC's components. Vacuum gauges (G-TRAN series) have been developed to achieve the centralization of process control of the systems and downsizing. They consist of three basic units, which are a sensor unit, a box unit, and a display unit, and the respective units can be combined depending on the application.

Our dry pumps (LR/HR series) feature improved maintainability and reduced noise, and are highly durable in hard processes such as CVD and etching. In addition, they allow a reduction of up to approximately 70% in power consumption in combination with ECO-SHOCK in light processes and are indispensable for a large system equipped with a pumping system using two or more pumps.

Dry Pumps

ER Series Energy-Saving Dry Pumps

Dry Pumps LR/HR Series

Eco-Shock Power-Saving Attachment

Oil Rotary Pumps

D-240DK Series

PVD Series Oil Rotary Vacuum Pumps(155 to 372 l/min)

VD Series Oil Rotary Vacuum Pumps(500 to 800 l/min)

PKS Series Oil Rotary Vacuum Pumps(1,600 to 7,000 l/min)

VS Series Oil Rotary Vacuum Pumps (2,500 to 4,800 l/min)

YM-VD, YM-VS Series Evacuation Systems(1,580 to 20,000 l/min)

TM/TMX Series Oil Mist Traps

Mechanical Booster Pumps

PMB-B/C Series Mechanical Booster Pumps

PRC-A Series Mechanical Booster Pumps

Turbo Molecular Pump

UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps

YTP Series Turbo Molecular Pump Evacuation Units

UTM Series Pivot Bearing Type Turbo Molecular Pumps

Display

G-tran series 1CH Display Unit ISG1

Pirani Vacuum Gauges

G-TRAN series Atmosphric Pirani Gauge SW1

G-Tran Series Pirani Gauge Measuring Units

Hot Cathode Gauges

G-Tran Series Hot Cathode Gauge Box Unit

Cold Cathode Gauges

G-Tran Series Cold Cathode Gauge Measuring Units

Capacitance Manometers Gauge

GM-1000/GM-2000 Ceramic Capacitance Manometer Controllers

CCM-A Series Ceramic Capacitance Manometers

Transducer Gauges

G-Tran Series

Gas Analyzers

Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM

Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM

Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM

Software for Gas Analysis Qulee QCS

REPROS Process Monitors for Reaction Gas

HIRESOM High-Resolution Quadrupole Mass Spectrometer

Leak Detectoers

Leak Tester HELIOT model 103

Leak Detector HELIOT 710 Series

Surface Profile Measurement

Dektak 8 Stylus Surface Profiler

Dektak 150 Stylus Surface Profiler

Deposition Controll & Measurement

CRTM-6000 Quartz Crystal Deposition Controller

CRTM-9000 Quartz Crystal Deposition Controller

CRTS-12NS Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller

Film Thickness Measurement

ESM Series Automatic Ellipsometers

RF Power Supplies

RFS-A Series RF Power Supplies

RGN-1302 RF Power supply

DC Power Supplies

DCL Series DC Power Supplies for Sputtering

DCS series DC Power Supplies

EB Power Supplies

HPS Series EB Power Supplies

EGK/EGL/EGO Series EB gun for vacuum evaporation

Vacuum Valves

VUGH-F Series Ultra-High Vacuum Gate Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals

10AI Series Manual Ultra-High Vacuum Air Inlet Valves

VUH SeriesManual Ultra-High Vacuum Metal Valves(Conflat Flange Type)

VUH-MVF Manual Ultra-High Vacuum Mini Valve(Conflat Flange Type)

VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals

VULH-KF Series Ultra-High Vacuum L-Valves(KF Flange Type)With Manual Operation and Bellows Shaft Seals

VULH-F SeriesUltra-High Vacuum L-Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals

VUGH-CS Series Ultra-High Vacuum Gate Valves(Conflat Flange Type) With Manual Operation and Bellows Shaft Seals

VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals

VLH-US-KF Series High Vacuum L-Valves (KF Flange Type)With Manual Operation and O-Ring Shaft Seals With Manual Operation and O-Ring Shaft Seals

VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Manual Operation and O-Ring Shaft Seals

VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Pneumatic Operation and O-Ring Shaft Seals

VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals

VAP Series High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals

VUGP-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals

VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VULP-F Series Ultra-High Vacuum L-Valves(Vacuum Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VULP-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type)With Pneumatic Operation and Bellows Shaft Seals

Flanges

UFC Series Ultra-High Vacuum Flanges(Fix)

UFC Series Ultra-High Vacuum Flanges(Rotation)

UFC Series Ultra-High Vacuum Flanges(Conversion)

Ultra-High Vacuum Conversion Flanges

Viewing Windows

TVU-FV Series Ultra-High Vacuum Zero Length Viewing Windows

Each Feedthroughs

TDU Series Ultra-High Vacuum Rotary Feedthroughs

TSU Series Ultra-High Vacuum Linear Feedthroughs

CMS Series Electrical Feedthroughs