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ULVAC GROUP

Vacuum Solution -Semiconductor-

Vacuum Solution -Solar cell-

Vauum Solution -FPD-

Vacuum Solution -Car-

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Vacuum Pump

  • Dry Pump
  • Oil Rotary Pump
  • Mechanical Booster Pump
  • Turbo Molecular Pump
  • Oil Diffusion Pump
  • Titanium Getter Pump
  • Ion Pump
  • Cryo Pump

Process Gas Monitor

Leak Detector

Thin film Measurement

Deposition Controller

Vacuum Valve

  • Angle-Valve
  • Gate-Valve
  • Other Types Of Valve

Power Supplies & EB Gun

Parts for Ultra-High Vacuum

Biosensor

Surface Treatment & Coating

Sputtering Target

Material

Thermal Analyser

  • Thermal Analysis
  • Specific Heat Capacity
  • Heat Expansion
  • High Temperature Observation
  • Thermal Conductivity
  • Seebeck Coefficient
  • Saturated Vapor Pressure Measurements
  • Relative Change in Viscosity
  • Temperature-Programmed Gas Desorption
  • Heat Treatment
  • Thermal Shock
  • Zone Melting
  • Wettability, Contact Angle
  • Thin Film Coating
  • Nano Particle Coating

Vacuum Pump

  • Dry Pump
  • Oil Rotary Pump
  • Mechanical Booster Pump
  • Turbo Molecular Pump
  • Oil Diffusion Pump
  • Titanium Getter Pump
  • Ion Pump
  • Cryo Pump

Vacuum Gauge

  • Pirani Vacuum Gauge
  • Cold Cathode Type Ionization Vacuum Gauge
  • Hot Cathode Type Ionization Vacuum Gauge
  • Extremely High Vacuum Gauge

Process Gas Monitor

  • Gas Analyzer

Leak Detector

  • Leak Detector

Thin Film Measurement

  • Thin Film Measurement

Deposition Controller

  • Deposition Controller

Vacuum Valve

  • Angle-Valve
  • Gate-Valve
  • Other Types Of Valve

Power Supply & EB Gun

  • Power Supply & EB Gun

Parts for Ultra-High Vacuum

  • Parts for Ultra-High Vacuum

Biosensor

  • Biosensor

Surface Treatment & Coating

  • Surface Treatment & Coating

Sputtering Target

  • Sputtering Target

Material

  • Material

Thermal Analyzer

  • Thermal Analysis
  • Specific Heat Capacity
  • Heat Expansion
  • High Temperature Observation
  • Thermal Conductivity
  • Seebeck Coefficient
  • Saturated Vapor Pressure Measurements
  • Relative Change in Viscosity
  • Temperature-Programmed Gas Desorption
  • Heat Treatment
  • Thermal Shock
  • Zone Melting
  • Wettability, Contact Angle
  • Thin Film Coating
  • Nano Particle Coating

Vacuum Pump

  • Dry Pump
  • Oil Rotary Pump
  • Mechanical Booster Pump
  • Turbo Molecular Pump
  • Oil Diffusion Pump
  • Titanium Getter Pump
  • Ion Pump
  • Cryo Pump

Vacuum Gauge

  • Pirani Vacuum Gauge
  • Cold Cathode Type Ionization Vacuum Gauge
  • Hot Cathode Type Ionization Vacuum Gauge
  • Extremely High Vacuum Gauge

Process Gas Monitor

  • Gas Analyzer

Leak Detector

Thin Film Measurement

Deposition Controller

Vacuum Valve

  • Angle-Valve
  • Gate-Valve
  • Other Types Of Valve

Power Supply & EB Gun

Parts for Ultra-High Vacuum

Biosensor

Surface Treatment & Coating

Sputtering Target

Material

Thermal Analyzer

  • Thermal Analysis
  • Specific Heat Capacity
  • Heat Expansion
  • High Temperature Observation
  • Thermal Conductivity
  • Seebeck Coefficient
  • Saturated Vapor Pressure Measurements
  • Relative Change in Viscosity
  • Temperature-Programmed Gas Desorption
  • Heat Treatment
  • Thermal Shock
  • Zone Melting
  • Wettability, Contact Angle
  • Thin Film Coating
  • Nano Particle Coating

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