ULVAC VACUUM >  Vacuum technology for the semiconductor industry

Various kinds of vacuum technology are used in semiconductor manufacturing processes.

Deposition technology such as sputtering and CVD and etching technology are used in complicated semiconductor manufacturing processes involving severe conditions.

ULVAC's measuring instruments are indispensable for parameter control in these processes.

The G-TRAN series, which is designed with consideration given to integration into various automated systems in addition to accurate pressure measurement, and residual gas analyzers (Qulee series), which are used in the evaluation of vacuum quality, are not only installed in ULVAC's semiconductor manufacturing systems, but have also earned a high reputation as individual units in many semiconductor manufacturing lines.

Dry Pumps

ER Series Energy-Saving Dry Pumps

Dry Pumps LR/HR Series

Eco-Shock Power-Saving Attachment

Mechanical Booster Pumps

PMB-B/C Series Mechanical Booster Pumps

PRC-A Series Mechanical Booster Pumps

Turbo Molecular Pump

UTM-FW/FH Series Digitally-Controlled Magnetic Levitation Turbo Molecular Pumps

YTP Series Turbo Molecular Pump Evacuation Units

UTM Series Pivot Bearing Type Turbo Molecular Pumps

Display

G-tran series 1CH Display Unit ISG1

Pirani Vacuum Gauges

G-TRAN series Atmosphric Pirani Gauge SW1

G-Tran Series Pirani Gauge Measuring Units

Hot Cathode Gauges

G-Tran Series Hot Cathode Gauge Box Unit

Cold Cathode Gauges

G-Tran Series Cold Cathode Gauge Measuring Units

Capacitance Manometers Gauge

GM-1000/GM-2000 Ceramic Capacitance Manometer Controllers

CCM-A Series Ceramic Capacitance Manometers

Transducer Gauges

G-Tran Series

Gas Analyzers

Residual Gas Analysis/Process Gas Monitor Compact Process Gas Monitor Qulee CGM

Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM

Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM

Software for Gas Analysis Qulee QCS

REPROS Process Monitors for Reaction Gas

Leak Detectoers

Leak Tester HELIOT model 103

Leak Detector HELIOT 710 Series

Surface Profile Measurement

Dektak 8 Stylus Surface Profiler

Dektak 150 Stylus Surface Profiler

Deposition Controll & Measurement

CRTM-6000 Quartz Crystal Deposition Controller

CRTM-9000 Quartz Crystal Deposition Controller

CRTS-12NS Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller

Film Thickness Measurement

MESEC Non-Contact Metal Film Thickness Measurement System

ESM Series Automatic Ellipsometers

RF Power Supplies

RFS-A Series RF Power Supplies

RGN-1302 RF Power supply

DC Power Supplies

DCL Series DC Power Supplies for Sputtering

DCS series DC Power Supplies

EB Power Supplies

HPS Series EB Power Supplies

EGK/EGL/EGO Series EB gun for vacuum evaporation

Vacuum Valves

VUGH-F Series Ultra-High Vacuum Gate Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals

10AI Series Manual Ultra-High Vacuum Air Inlet Valves

VUH SeriesManual Ultra-High Vacuum Metal Valves(Conflat Flange Type)

VUH-MVF Manual Ultra-High Vacuum Mini Valve(Conflat Flange Type)

VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals

VULH-KF Series Ultra-High Vacuum L-Valves(KF Flange Type)With Manual Operation and Bellows Shaft Seals

VULH-F SeriesUltra-High Vacuum L-Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals

VUGH-CS Series Ultra-High Vacuum Gate Valves(Conflat Flange Type) With Manual Operation and Bellows Shaft Seals

VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals

VLH-US-KF Series High Vacuum L-Valves (KF Flange Type)With Manual Operation and O-Ring Shaft Seals With Manual Operation and O-Ring Shaft Seals

VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Manual Operation and O-Ring Shaft Seals

VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Pneumatic Operation and O-Ring Shaft Seals

VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals

VAP Series High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals

VUGP-F Series Ultra-High Vacuum Gate Valves (Vacuum Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals

VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VULP-F Series Ultra-High Vacuum L-Valves(Vacuum Flange Type)With Pneumatic Operation and Bellows Shaft Seals

VULP-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type)With Pneumatic Operation and Bellows Shaft Seals

Flanges

UFC Series Ultra-High Vacuum Flanges(Fix)

UFC Series Ultra-High Vacuum Flanges(Rotation)

UFC Series Ultra-High Vacuum Flanges(Conversion)

Ultra-High Vacuum Conversion Flanges

Viewing Windows

TVU-FV Series Ultra-High Vacuum Zero Length Viewing Windows

Each Feedthroughs

TDU Series Ultra-High Vacuum Rotary Feedthroughs

TSU Series Ultra-High Vacuum Linear Feedthroughs

CMS Series Electrical Feedthroughs