Various kinds of vacuum technology are used in semiconductor manufacturing processes.

Deposition technology such as sputtering and CVD and etching technology are used in complicated semiconductor manufacturing processes involving severe conditions.

ULVAC's measuring instruments are indispensable for parameter control in these processes.

The G-TRAN series, which is designed with consideration given to integration into various automated systems in addition to accurate pressure measurement, and residual gas analyzers (Qulee series), which are used in the evaluation of vacuum quality, are not only installed in ULVAC's semiconductor manufacturing systems, but have also earned a high reputation as individual units in many semiconductor manufacturing lines.