"Qulee" (pronounced as "KLEE") is ULVAC's latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1 Pa) order the simple (easy) to use Qulee today!
Process Gas Monitor "Qulee" has 4 models in accordance with the intended use.
Choose from Sputtering/ R&D/ Evaporation/ or CVD.
Residual Gas Analysis/Process Gas Monitor
Reactive Process Gas Monitor Qulee RGM
･Stable measurements for a long period
･Closed ion source utilizing a magnetic field
･For etching and CVD process
･Monitoring reactive gases during process.
･End-point monitoring for etching and cleaning processes.
Software for Gas Analysis Qulee QCS fitted as standard equipment
Qulee QCS is a software for gas analyzers and process monitors of ULVAC.
This software has basic functions for gas analysis and process monitoring; peak-intensity monitoring, leak testing and recipe-based monitoring.
The operation of the data acquisition and the saving data is carried out by simple clicking. The software includes another functions in addition to basic functions; background subtraction, measured area integration, data saving as CSV format, and controlling more than one sensors through RS485-interface.
"Qulee QCS" suits for various needs such as gas analysis,process monitoring, and research and development.
Our old model, that includes QCS 2001 or MSQ-400, MM200 etc., can upgrade to "Qulee QCS".
