"Qulee" (pronounced as "KLEE") is ULVAC's latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1 Pa) order the simple (easy) to use Qulee today!
Process Gas Monitor "Qulee" has 4 models in accordance with the intended use.
Choose from Sputtering/ R&D/ Evaporation/ or CVD
Residual Gas Analysis/Process Gas Monitor
Compact Process Gas Monitor Qulee CGM
･No differential pumping system required (at 1Pa lower)
･Process monitoring for PV, FPD, and Semiconductor system.
･Residual gas analysis in PVD system.
･Reduce downtime.
･Leaktesting
Software for Gas Analysis Qulee QCS (Always included free of charge)
Qulee QCS is software utilized with ULVAC gas analyzers and process monitors. This software has basic functions for gas analysis and process monitoring; peak-intensity monitoring, leak testing and recipe-based monitoring. Operation of data acquisition and saving data is carried out by simple clicking. The software includes additional functions; such as background subtraction, measured area integration, data saving as CSV format, and controlling more than one sensor through RS485-interface.
"Qulee QCS" is suited for various needs such as gas analysis, process monitoring, and research development.
Our old models that include QCS 2001 or MSQ-400, MM200 etc., can be upgraded to "Qulee QCS".
