ULVAC EB guns for electron beam evaporation all use magnetic field deflection,and are structured to minimize contamination from the evaporated material. A wide lineup of models is available. The EGK Series is designed for low-capacity research applications,the EGL Series is for metal film production,and the EGO Series is for optical film production.

The HPS series are power supplies for electron beam evaporation. They can be used together with the EGL Series or other electron guns, for stable evaporation.