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DC Power Supply

As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications. Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.

ULVAC new DCL Series are DC power supplies for sputtering that come with the world's highest level of arc energy reduction as a standard function. This function enables them to minimize the energy emitted by abnormal discharges. The series is low-priced, and comes with other outstanding functions, including a high-speed control function, a wide range of output control functions, and communication functions.