Newly developed coaxial vacuum arc deposition system, APD-S, can form extremely smooth ultra thin films or well size-controlled nano-particles, owing to metal plasma of target material generated by pulsed vacuum arc discharge.

Newly developed coaxial vacuum arc deposition system, APD-P, can form extremely smooth ultra thin films or well size-controlled nano-particles,owing to metal plasma of target materials generated by pulsed vacuum arc discharge.