ULVAC's mechanical booster pumps can be used in conjunction with roughing pumps ,(such as oil rotary pumps and dry vacuum pumps), in order to improve the pumping speed in the 10 k-0.1 Pa ranges, where pumping speeds of roughing pumps often deteriorate.
By using them together with dry pumps, oil rotary vacuum pumps or water-sealed pumps, mechanical booster pumps can increase the evacuation speed in the 1 kPa to 0.1 Pa range, where rough pump evacuation speed drops. The models in the PRC-A Series are the successors to ULVAC's PMB-006C(M), and PMB-012C(M) models. Like the PMB-C(M) Series, they are Roots pumps designed for general-purpose applications, as well as semiconductor and LC manufacturing processes that require a highly clean atmosphere inside and outside the pump. The PMB-C Series is ideal for general-purpose applications and clean applications. The PMB-B Series is ideal for large-capacity evacuation, such as for heat treatment furnaces and melting furnaces.
The PRC-A Series are improved versions of ULVAC's long-used PMB-003C(M), PMB-006C(M) and PMB-012C(M) models. They have the same evacuation performance with lower noise and greater reliability, and are ideal for use in the dust-sensitive environments required for clean rooms for semiconductor and LC manufacturing processes. The PRC-A Series are Roots pumps designed mainly for processes requiring highly clean atmospheres. They can be used with auxiliary pumps, to increase the evacuation speed in the 10 kPa to 1 Pa range.
Compact and light weight roots type vacuum pump to support pumping speed of backing pump.
