RTP (rapid thermal processing) is drawing attention as an important heating technique as the semiconductor fabrication process requires higher and higher density and smaller and smaller size. The MILA-5000 series is a compact, low cost lamp heating unit that embodies the features of rapid heating/cooling capabilities, accurate temperature controllability, clean heating, arbitrary selection of atmosphere, and others in one temperature controller/atmosphere variable chamber.

ULVAC-RIKO employed the infrared gold image furnace for thermal analysis for the first time in the world and opened up a new field in high speed, high accuracy measurement, which had been unthinkable with the conventional furnaces.Because of the unique features of the focusing gold image furnace, it is finding an increasingly wide range of application in gas analysis with pyrolyzer, sintering test, heating (furnace) for tensile test, and others.

The ULVAC-RIKO infrared gold image furnace has made a dramatic advance along with its associated equipment and has completely changed the image of the heating system. The parabolloidal reflection type infrared gold image furnace features rapid heating and cooling with high accuracy. The furnace is compatible with small-scale experimental units to large-scale systems by combining various types of image furnaces, including the standard tubular furnace.

Development of new materials, such as fine ceramics, composite materials, and others, requires thermal evaluation tests in a high temperature region. The VHT series furnace was developed as a heating system that can easily attain an ultrahigh temperature within a short time. It is best suited to thermal shock experiment of materials in a wide range, heat cycle experiment, tensile/bending test and sintering (furnace). A large variety of models is available and can be upgraded according to the sample.