Combining an Infrared Gold Image Furnace and temperature controller, the QHC series is a compact high speed heating/cooling system equipped with a quartz heat treatment chamber. The VHC series adds a vacuum pumping system and Pirani gauge to the features of the QHC series. Heating operations are performed on a PC, and data can be easily managed. Both systems are customizable to your needs.

ULVAC-RIKO employed the infrared gold image furnace for thermal analysis for the first time in the world and opened up a new field in high speed, high accuracy measurement, which had been unthinkable with the conventional furnaces.Because of the unique features of the focusing gold image furnace, it is finding an increasingly wide range of application in gas analysis with pyrolyzer, sintering test, heating (furnace) for tensile test, and others.

The SSA series is a low cost heating system consisting of an infrared gold image furnace and a quartz chamber including a sample holder.

The Model RTP-6 is a low cost infrared lamp heating system designed for a maximum 6-inch wafer. This system is designed for testing wafers, including silicon semiconductors and compound semiconductors, by rapid heating/cooling in varying atmospheres. It is manually operated and is best suited to R & D.

As semiconductor devices become smaller and smaller in size and higher and higher in density, conventional batch type heat treatment is being replaced by wafer-to-wafer treatment. ULVAC-RIKO, specialist in thermal instrumentation, has commercialized RTA series of wafer-to-wafer infrared lamp heating systems by taking full advantage of its high speed heating techniques for the infrared gold image furnace acquired over the past years. The RTA series covers a complete range from 2 inches diameter to 300mm diameter and from silicon to compounds to meet a wide variety of requirements.

This system is designed to heat the front and back sides of a sample set on a carbon susceptor coated with SiC using an infrared lamp. Thermocouples (5 pairs) embedded in the susceptor adjust the power balance in the heater zone to achieve temperature uniformity in the plane.

The ULVAC-RIKO infrared gold image furnace has made a dramatic advance along with its associated equipment and has completely changed the image of the heating system. The parabolloidal reflection type infrared gold image furnace features rapid heating and cooling with high accuracy. The furnace is compatible with small-scale experimental units to large-scale systems by combining various types of image furnaces, including the standard tubular furnace.

Development of new materials, such as fine ceramics, composite materials, and others, requires thermal evaluation tests in a high temperature region. The VHT series furnace was developed as a heating system that can easily attain an ultrahigh temperature within a short time. It is best suited to thermal shock experiment of materials in a wide range, heat cycle experiment, tensile/bending test and sintering (furnace). A large variety of models is available and can be upgraded according to the sample.