ULVAC VACUUM > Glossary > R
Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in
R
R
- radio frequency mass spectrometer
- reactive sputter etching
- relative sensitivity factor
- residence time
- response time
- Reynolds number
- Roots vacuum pump
- rotary piston vacuum pump
- rotary plunger vacuum pump
- rotary vacuum seal
- rough vacuum pump; low vacuum pump
- roughing line
- roughing vacuum pump
- roughing valve













