ULVAC VACUUM > Glossary > P
Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in
P
P
- packed valve
- packing
- packless valve
- partial pressure
- partial pressure vacuum gauge; partial pressure analyzer
- pascal
- Penning gauge
- permeation
- physical adsorption; physisorption
- Pirani gauge
- piston vacuum pump
- plasma
- plasma CVD
- plasma etching
- plasma oxidation
- plug valve
- Poiseuille flow
- port
- positive displacement (vacuum) pump
- pressure
- pressure gauge
- pressure rise test, build-up test
- pressure testing
- probe
- probe gas
- probe test
- pump case
- pump fluid
- pump-out
- pumping speed; volume flow rate of a vacuum pump













