ULVAC VACUUM > Glossary > M
Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in
M
M
- magnetic deflection mass spectrometer
- Magnetic fluid seal
- main pump
- masking
- mass flow rate
- maximum working pressure
- Maxwellian velocity distribution
- McLeod gauge
- mean free path
- medium vacuum
- mercury cut-off
- mercury sealed stop-cock
- migration
- minimum detectable leak (by a leak detecting system)
- minimum detectable pressure change (by a leak detector element)
- MOCVD, metal organic CVD
- modulator gauge
- molar flow rate
- molecular beam epitaxy
- molecular distillation
- molecular drag pump
- molecular effusion; effusive flow
- molecular flow
- molecule flow rate density
- molecule flow rate; molecule flux
