ULVAC VACUUM > Glossary of Vacuum
Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in
A
B
- back seat gasket
- back-diffusion of gas
- back-migration
- back-streaming
- background
- backing pressure
- backing vacuum pump
- baffle
- baffle valve
- ball valve
- ballast tank
- Bayard-Alpert gauge
- bellows
- bellows sealed valve
- bent beam gauge
- blade; vane
- blank-off plate, cover plate
- body (of a valve)
- bonnet (of a valve)
- bonnet gasket
- booster vacuum pump
- Bourdon gauge
- by-pass line
C
- chemical adsorption; chemisorption
- chevron seal
- clean-up time
- cold cathode ionization gauge
- cold cathode magnetron gauge
- cold trap
- collision rate
- compression gauge
- compression ratio
- con flat flange
- condensation coefficient
- condensation rate
- conductance
- cone seal
- critical backing pressure
- cryopump
- cryosorption pump
D
- degassing
- degree of saturation
- desorption
- detectability
- diaphragm gauge
- diaphragm valve
- differential leak detector
- differential vacuum gauge
- diffuser
- diffuser throat
- diffusion
- diffusion coefficient; diffusivity
- diffusion pump
- diffusion-ejector pump
- discharge tube indicator
- discharge valve
- disk (of a valve)
- disk seal
- dry-sealed vacuum pump
E
F
G
H
I
J
K
L
M
- magnetic deflection mass spectrometer
- Magnetic fluid seal
- main pump
- masking
- mass flow rate
- maximum working pressure
- Maxwellian velocity distribution
- McLeod gauge
- mean free path
- medium vacuum
- mercury cut-off
- mercury sealed stop-cock
- migration
- minimum detectable leak (by a leak detecting system)
- minimum detectable pressure change (by a leak detector element)
- MOCVD, metal organic CVD
- modulator gauge
- molar flow rate
- molecular beam epitaxy
- molecular distillation
- molecular drag pump
- molecular effusion; effusive flow
- molecular flow
- molecule flow rate density
- molecule flow rate; molecule flux
N
O
P
- packed valve
- packing
- packless valve
- partial pressure
- partial pressure vacuum gauge; partial pressure analyzer
- pascal
- Penning gauge
- permeation
- physical adsorption; physisorption
- Pirani gauge
- piston vacuum pump
- plasma
- plasma CVD
- plasma etching
- plasma oxidation
- plug valve
- Poiseuille flow
- port
- positive displacement (vacuum) pump
- pressure
- pressure gauge
- pressure rise test, build-up test
- pressure testing
- probe
- probe gas
- probe test
- pump case
- pump fluid
- pump-out
- pumping speed; volume flow rate of a vacuum pump
Q
R
- radio frequency mass spectrometer
- reactive sputter etching
- relative sensitivity factor
- residence time
- response time
- Reynolds number
- Roots vacuum pump
- rotary piston vacuum pump
- rotary plunger vacuum pump
- rotary vacuum seal
- rough vacuum pump; low vacuum pump
- roughing line
- roughing vacuum pump
- roughing valve
S
- sampling probe, pressure probe, sniffer
- saturated vapor
- saturation vapor pressure
- seat (of valve)
- seat gasket
- self-purifying diffusion pump
- sensitivity
- sensitivity of a leak detector
- sensitivity of a leak-detecting element
- sliding vane rotary vacuum pump
- soap bubble test
- sorption
- sorption trap
- sputter ion pump
- sputtering
- standard leak
- standard reference conditions for gases
- starting pressure
- stem (of a valve)
- sticking probability
- sticking rate
- stop-cock
- sublimation pump; evaporation pump
- substitution sensitivity factor
- suppressor gauge
T
- thermal conductivity gauge
- thermal CVD
- thermal transpiration
- thermistor gauge
- thermocouple gauge
- throughput
- throughput of a vacuum pump
- time of flight mass spectrometer
- Torr
- total pressure
- total pressure vacuum gauge
- tracer gas, search gas
- transmission probability; Clausing's factor
- trap
- triode gauge
- trochoidal focusing mass spectrometer
- turbine vacuum pump
- turbo-molecular pump
U
V
- V-ring gasket
- vacuum
- vacuum brazing
- vacuum cement
- vacuum coolingvacuum cooling
- vacuum cup stop-cock
- vacuum deposition
- vacuum distillation
- vacuum drying, vacuum dehydration
- vacuum gauge
- vacuum grease
- vacuum heat treatment
- vacuum manifold
- vacuum melting
- vacuum paint
- vacuum pump
- vacuum pump oil
- vacuum testing
- vacuum wax
- valve
- vapor jet vacuum pump
- vapor pump
- vapor tube; vapor pipe; vapor chimney
- vapor; vapour (UK)
- viscosity gauge
- viscous flow
- volume collision rate
- volume flow rate
