Reactive Process Gas Process Monitoring System Qulee RGM-202/RGM-302 has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. By ULVAC’s original ion source and pumping system enable you to have stable measurements.
ULVAC's new residual gas analyzer QULEE series, with revolutionary simplicity and usability, now offers a high-end model "QULEE HGM". Achieving highest sensitivity among all models at 2.5 x 10-6 A/Pa, QULEE HGM can meet the needs in various R&D and other vacuum system process monitoring.
"Qulee" (pronounced as "KLEE"), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.
"Qulee" (pronounced as "KLEE"), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.
A Variation of Qulee, adding new features in response to customer needs. By adding the differential pumping unit, this product enables various measurement/analysis from process management to residual gas analysis.
Qulee QCS is a software for gas analyzers and process monitors of ULVAC. This software has basic functions for gas analysis and process monitoring; peak-intensity monitoring, leak testing and recipe-based monitoring. The operation of the data acquisition and the saving data is carried out by simple clicking. The software includes another functions in addition to basic functions; background subtraction, measured area integration, data saving as CSV format, and controlling more than one sensors through RS485-interface. "Qulee QCS" suits for various needs such as gas analysis, process monitoring, and research and development. Our old model, that includes QCS 2001 or MSQ-400, MM200 etc., can upgrade to "Qulee QCS".
