Vacuum technology is indispensable for the FPD (Flat Panel Display) industry.

ULVAC has display manufacturing systems including leading-edge thin-film forming systems for polysilicon TFT LCDs for large substrates and holds the largest share in the global market. ULVAC's advanced vacuum technology is used for various components included in these manufacturing systems.

For example, our dry pumps (LR/HR series) feature improved maintainability and reduced noise and are highly durable in hard processes such as CVD and etching. In addition, they allow a reduction of up to approximately 70% in power consumption in combination with ECO-SHOCK in light processes and are indispensable for a large system equipped with a pumping system using two or more pumps. Various measuring instruments (G-TRAN vacuum gauges and Qulee gas analyzers) are indispensable for vacuum quality control.