ULVAC VACUUM > Extremely High Vacuum Gauge

Extremely High Vacuum Gauge

ULVAC's extremely high vacuum gauge "AxTRAN" uses an energy analyzer to completely separate the ion source and ion collector. It enables highly quantifiable pressure measurements in a wide pressure range (10-2 to 10-11 Pa).

AxTRAN is an extremely high vacuum gauge developed by ULVAC that uses an energy analyzer to completely separate the ion source and ion collector. This structure lets AxTRAN separate and measure noise current generated inside/outside the gauge, and gas ion current dependent on the pressure generated in the ion source. It enables highly quantifiable pressure measurements in a wide pressure range (10-2 to 10-11Pa).