ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR series has excellent reliability in sublimate generating processes such as SiN-LPCVD and metal etching, etc.
Effective utilization of compressed heat which is own high temperature uniformity technology has given this dry pump series a high durability in the hard processes of CVD, etching etc. In the light processes, approximately up to 70% of electric power consumption reduction is possible by having the ECHO-SHOCK on the pump. CE marking is available for all series (optional).
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
Diaphragm type Pump creates vauum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy.
High vacuum type diaphragm vacuum pump which can be used as a back pump for turbo molecular pump.
Anti-corrosive type dry diaphragm pump by adoption of special surface treatment and parts.
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor.(DOP-80SP)
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor.(DOP-80SP)
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor.(DOP-80SP)
Oil-free scroll-type vacuum pump can creates high vacuum realizing lower noise and vibration.
Oil-free scroll-type vacuum pump can creates high vacuum realizing lower noise and vibration.
