ULVAC VACUUM > Deposition Controller > Crystal Oscillation Type Deposition Controller

Crystal Oscillation Type Deposition Controller

CRTM-9000G is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.005Å ). An option enables deposition control for up to 4 materials simultaneously.

CRTM-6000G is a quartz crystal deposition controller that can monitor and control deposition film thicknesses and deposition rates with an outstanding resolution. Its compact body (half-rack size) enables low-rate control, and continuous deposition control of multilayer films with up to 99 layers.

The rotary type multi-sensor “CRTS-M6” has developed for the crystal oscillation type deposition controller “CRTM-6000G and 9000G” .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.

The rotary type multi-sensor "CRTS-12" has developed for the crystal oscillation type deposition controller "CRTM-6000 and 9000" . The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.