ULVAC VACUUM > Cryo Pump

Cryo Pump

ULVAC has developed and improved cryo pump, based on ULVAC’s vacuum technology coupled with the extremely low temperature technologies of Brooks Automation. We offer standard models from 4 inches to 30 inches. Custom types of cryo pump are also available.

Standard Type 6"

CRYO-U6H

CRYOPUMPS (STANDARD) 6" TYPE

Standard Type 8"

CRYO-U8H

CRYOPUMPS (STANDARD) 8" TYPE

CRYO-U8H-U

CRYOPUMPS (STANDARD) 8" TYPE

CRYO-U8HSP

CRYOPUMPS (STANDARD) 8" TYPE

CRYO-U8HL

CRYOPUMPS (STANDARD) 8" TYPE

Standard Type 10"

CRYO-U10H

CRYOPUMPS (STANDARD) 10" TYPE

Standard Type 12"

CRYO-U12H

CRYOPUMPS (STANDARD) 12" TYPE

CRYO-U12HSP

CRYOPUMPS (STANDARD) 12" TYPE

CRYO-U12HL

CRYOPUMPS (STANDARD) 12" TYPE

Standard Type 16"

CRYO-U16

CRYOPUMPS (STANDARD) 16" TYPE

CRYO-U16P

CRYOPUMPS (STANDARD) 16" TYPE

Standard Type 20"

CRYO-U20P

CRYOPUMPS (STANDARD) 20" TYPE

Standard Type 22"

CRYO-U22H

CRYOPUMPS (STANDARD) 22" TYPE

Standard Type 30"

CRYO-U30H

CRYOPUMPS (STANDARD) 30" TYPE

Special Type

BAKEABLE TYPE

SPECIAL CRYOPUMPS

L TYPE

SPECIAL CRYOPUMPS

CORROSION-PROOF TYPE

SPECIAL CRYOPUMPS

SUPER TRAP CRYO-T SERIES

SPECIAL CRYOPUMPS