ULVAC VACUUM > Vacuum Gauges > Cold Cathode Gauges > G-Tran Series Cold Cathode Gauge Measuring Units
G-Tran Series Cold Cathode Gauge Measuring Units
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The G-Tran Series contains two cold cathode gauge measuring units: a sensor unit (SC1) and box unit (BCR2). The sensor unit has an integrated gauge head and circuit (with a replaceable gauge head). The box unit has a separate gauge head and circuit, enabling gauge head baking. It also comes with an RS-485 interface.
- • Output of analog signals and set points (2 points)
• Pseudo-logarithmic output (box unit only)
• RS-485 communication (supports multi-drop; box unit only)
• Easy gauge head replacement and maintenance
• Enables gauge head baking(box unit only).
- • Process control for equipment for manufacturing semiconductors or other electronic parts
• Process control for furnaces and other industrial equipment
• Process control for manufacturing equipment with several process chambers (such as inline or single-wafer systems)
| Name | Sensor unit | Box unit |
| Model | SC1 | BCR2 |
| Compatible gauge heads | C-21, C-23, C-24, C-25 | C-31, C-33, C-34, C-35 |
| Measured pressure range (Pa) | 5.0 x 10-5 to 1.0 | |
| Operating temperature range (ºC) | 10 to 40 | |
| Recorder output | Non-linear output : 0 to 10 VDC | |
| - | Pseudo-logarithmic output: 0 to 10 VDC (1 V linear output for each digit) |
|
| Control input signals | HV ON/OFF | |
| Control output signals | Pressure protection, set points 1/2 | |
| LED display | Power, HV, pressure protection, set points 1/2 | |
| Communication type | - | RS-485 |
| Power supply | DC24V±2V, 2A(MAX) | |
| I/O connector | D-sub, 15 sockets, M2.6 screw | |
| Gauge weight (g) | 430 | 310 |
| Options | Gauge head | |
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