ULVAC VACUUM > Film Thickness Measurement > Quatz Crystal Deposition controller > CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
CRTS-M6 Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
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The rotary type multi-sensor "CRTS-M6" has developed for the crystal oscillation type deposition controller "CRTM-6000G and 9000G" .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
- • 5MHz or 6MHz AT cut crystal can be mountable in 6 pieces.
• High reliability has been achieved with an original drive system that adopts the vacuum motor.
• The replacement of crystal is detachable together with the crystal holder.
• In case of the crystal failed (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
• The sensor head is small(50mm diameter), it is possible to install it in the evaporation deposition equipment flexibly.
- • High rate,multi-layer deposition control for Optical,OrganicEL,Electric devices.
| Sensor head | |
| Equipped crystal number | 6 pieces |
| Capacity of crystal | 5MHz or 6MHz(Selectable) AT cut crystal |
| Heat resistance temperature | 350C° |
| Cooling water volume | 1L / min |
| Weight | 1kg |
| Dimension (mm) | φ50mm x 210mm |
| Controller | |
| Digital input | INIT, CNT, STOP, INTER L |
| Digital output | SENSOR NO., BUSY, ERROR, RETRY, END |
| Utility | DC24V, 3.0A |
| Dimension | 100(W) x 252(D) x 99(H) |
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