ULVAC VACUUM > Gas analyzers > Gas analyzers > Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM

Residual Gas Analysis/Process Gas Monitor Basic Process Gas Monitor Qulee BGM

	PDFCatalogue Qulee BGM (484K)[PDF]
	PDFCatalogue Qulee series Option (528K) [PDF]

Adobe Acrobat Reader(Ver.6 or a later version)is required to open PDF files.

"Qulee" (pronounced as "KLEE"), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.

  Display integrated design

  Simple operation-"One Click" function

  Various leak tests are available

  Total pressure measurement

  Qulee QCS Software is included

  CE MARKING

  RoHS Compliance

  Residual gas analysis in PVD system and vacuum deposition.

  Residual gas analysis for high vacuum pumping equipment, etc.

  Residual gas analysis for freeze drying system.

  Various types of gas analysis for research and development.

Item	Qulee BGM
Model no.	BGM-101	BGM-201	BGM-102	BGM-202
Mass Filter Type	Quadrupole
Mass Range	1〜100 amu	1〜200 amu	1〜100 amu	1〜200 amu
Resolution	M/ΔM=1M(10% P.H.)
Sensitivity	10^-7A/Pa		4A/Pa
Minimum Detectable Partial Pressure	10^-8Pa		10^-12Pa
Detector Type	Faraday Cup		EM Tube/Faraday Cup
Maximum Operating Pressure	1x10^-2Pa
Toatal Puresure Function	capable
One Click function	capable/He/H₂O/N₂/O₂/Any Gas
One Click Leak Test function	capable
Power Input	DC24V
Maximum Sensor Operating Temperature	120ºC
Maximum Bakeout Temperature (electronics removed)	250ºC
Operating Temperature	10 - 40ºC
Standard Software	Qulee QCS (Windows 2000/XP/Vista)
CE MARKING	Compliance
RoHS	Compliance