ULVAC VACUUM > Gas analyzers > Gas analyzers > Quadurupole mass spectrometer with differential pumping kit Qulee with YTP
Quadurupole mass spectrometer with differential pumping kit Qulee with YTP
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A Variation of Qulee, adding new features in response to customer needs. By adding the differential pumping unit, this product enables various measurement/analysis from process management to residual gas analysis.
- • Enables various gas analysis by one unit, with the differential pumping unit.
• Selectable max measurable pressure (by choosing orifice)
• Software 窶弉ulee QCS窶� included. (compatible with Windows 2000, XP, and Vista)
- • Gas monitoring of PVD system during processing.
• Residual gas analysis in PVD system
• Residual gas analysis for high vacuum pumping equipment, etc.
• Various types of gas analysis for research and development
| Item | Qulee with YTP | |
| Qulee Main body | Select from 鐚｢GM-101 / 102 / 201 / 202 | |
| Max Sampling pressure | Select from 100000Pa (Atmospheric pressure) / 500Pa / 100Pa / 10Pa / 1Pa (by orifice size) |
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| Operating Temperature | 10 - 40ºC | Standard Software | Qulee QCS鐚�Windows2000/XP/Vista鐚� |
