ULVAC VACUUM
  • ULVAC VACUUM HOME
  • about ULVAC VACUUM
  • Vacuum Pumps
  • Vacuum Gauges
  • Gas Analyzers
  • Leak Detectors
  • Film Thickness Surface Profile Measurement
  • Power Supplies
  • Oters Vacuum Parts

ULVAC VACUUM >  Vacuum Gauges > Hot Cathode Gauges > GI-M2/GI-D7 Ionization Vacuum Gauge

GI-M2/GI-D7 Ionization Vacuum Gauge

GI-M2/GI-D7 Ionization Vacuum Gauge
Catalog Download Catalogue PDF File (440K) [PDF]
Adobe Acrobat Reader(Ver.6 or a later version)is required to open PDF files.

This series is hot cathode type ionization vacuum gauge,with analog displays,capable of measuring pressure in the high vacuum range using triodetube or B-A type sensor heads. ULVAC's GI-M2 metal ionization vacuum gauge supports a wide range of measurement ranges, from ultra-high vacuums to medium vacuums. Its compact size and metal sensor enable attachment anywhere, avoiding the risk of the damage encountered when using glass gauges.

Features
  • • Wide measurement range spans 8 1/2 digits (9.9 to 5 x 10-8Pa).(GI-M2)

    • Iridium filament material offers better durability in oxygen atmospheres and other applications.(GI-M2)

    • Compact metal sensor eliminates risk of damage and requires little system attachment space.(GI-M2)

    • Two independent set points

    • I/O and RS-232C interface are provided standard, for external control.
Applications
  • GI-M2 • Sputtering System

    • Vacuum evaporation system(Turbo-molecular pump type)

    • Pressure measurement for other general ultra-high vacuum pumping system

    GI-D7 • Vacuum evaporation system(Turbo-molecular pump type

    • Vacuum Brazing Furnace

    • Vacuum evaporation system(diffusion pump type)

    • Process control for furnaces and other industrial equipment
Specifications
Name GI-M2 GI-D7
Measured pressure range 5 x 10-8〜9.9 x 100Pa 1.3 x 10-5〜6.7 x 10-1Pa
Measurement precision ±15%
Pressure display Digital display, 2-digit mantissa, 1-digit exponent
Sampling time 100ms
Degassing method Heating from current passed directly through grid
Analog output Linear output of each digit's mantissa/pseudo-logarithmic output of entire measurement range: 0 to 10 V each
Digital output BCD (open collector)
Control outputs 2 set point relays, emission signal output, other
Control inputs REMOTE/LOCAL, filament ON/OFF, DEGAS ON/OFF,
filament protection ON/OFF
Functions Gas sensitivity setting N2/Ar/other user-specified value, range hold function, RS-232C
Operating temperature range 10 to 40ºC
Input voltage AC100V±10% 50/60Hz,100W
Weight 5.6kg 5.7kg
External dimensions
(W x D x H)
240 x 380 x 99 mm MAX
Accessories Power cord (3 m), external I/O connector, operating instructions
Options Gauge heads M-11,M-12,M-13,
M-14,M-15
WIT-G1,G2,G3,
WIB-G5,G6,G7,WIB-N3
Gauge head cables 5,10,15,20,25,
30,40,50m
(bakeable at 150ºC)
4,10,15,20,25,
30,40,50m

CAD data Download

At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer)
Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.

>> Caution <<
*This download system can be used with the common ID and password for ULVAC's website ulvac.co.jp/eng/.
* If you do not receive your password within 1 hour, please try registering again.
Please note that IDs and passwords are subject to change without notice.
If you are unable to access the download area with an ID and password
that you received in the past, please complete User Registration again to get your updated ID and password.
* Please note that DXF files and PDF files contain Japanese characters. Please also note that, depending on the PC/CAD environment,
files may not open, be displayed or be able to be used correctly.
* Please note that, because the conversion to DXF format is not
fully compatible, there may be problems such as garbled characters or layout misalignments.
* Due to product improvements, CAD data is subject to change without notice.
* ULVAC will not assume any responsibility whatsoever for any direct or indirect damages resulting from the use of this data.

ULVAC VACUUM PRODUCT CATEGORY