ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type)With Pneumatic Operation and Bellows Shaft Seals
VULP-KF Series Ultra-High Vacuum L-Valves (KF Flange Type)With Pneumatic Operation and Bellows Shaft Seals
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The VULP-KF Series are pneumatically-operated ultra-high vacuum L-valves developed using ULVAC's wealth of accumulated vacuum technology and experience. The large conductance when the disk is released maximizes vacuum pump specifications such as evacuation performance.
- • Bellows shaft seals eliminate particles.
• Simpler structure makes maintenance easy.
• Use of aluminum alloy enables more lightweight design.
• Low cost
• Surfaces are polished by electrolysis, for low out gas.
• Use of KF flanges makes piping attachment/removal easy.
- • Evacuation system lines on vacuum equipment
| Model | VULP-KF |
| Nominal size A | NW25, 40 |
| Valve material | Stainless steel |
| Gasket material | Bonnet seal, Disk seal : Fluororubber |
| Permitted baking temperature (ºC) | MAX : 150 (*1) |
| Operating pressure range (Pa) | 105 to 10-7 |
| Leak rate (Pa·m3/s) | <1.3 x 10-11 (*2) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Pneumatic operation |
| Compressed air operating pressure (MPa G) | 0.4 to 0.7 |
| OPEN/CLOSE signal output | Can be attached (option). (*3) |
| Back-pressure | Supported as standard feature. |
Note:This catalog uses SI measurement units. Conversion to non-SI units is as follows :
1Pa = 7.5 x 10-3Torr
*1č[šAir cylinder : 60ºC max.
*2č[šLeak rate doesn't include O-ring permeation rate.
*3č[šAuto switch model: D-A73 (with indicator light, 24 VDC/100 VAC)
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