ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals
VUGP-CS Series Ultra-High Vacuum Gate Valves (Conflat Flange Type) With Pneumatic Operation and Bellows Shaft Seals
 |
||
|
||
|
The VUGP-CS Series are pneumatically-operated ultra-high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. The large conductance when the disk is released maximizes vacuum pump specifications such as evacuation performance.
- • Bellows shaft seals eliminate particles.
• Simpler structure makes maintenance easy.
• Surfaces are polished by electrolysis, for low out gas.
• Low cost
• Enable high-temperature baking.
• Low vibrations
- • Evacuation system lines on vacuum equipment
| Model | VUGP-CS |
| Nominal size A | 40(UFC070) to 250(UFC306) |
| Valve material | Valve body, disk : stainless steel |
| Gasket material | Bonnet seal : Silver wire; Disk seal : Fluororubber |
| Permitted baking temperature (ºC) | OPEN : 200 / CLOSE : 150 (*1) |
| Operating pressure range (Pa) | 105 to 10-8 |
| Leak rate (Pa·m3/s) | <1.3 x 10-11 (*2) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Pneumatic operation |
| Compressed air operating pressure (MPa G) | 0.45 to 0.7 |
| OPEN/CLOSE signal output | Can be attached (option). (*3) |
| Back-pressure | Supported as standard feature up to 150A. Not supported for 200 and 250A. |
Note1:This catalog uses SI measurement units. Conversion to non-SI units is as follows:
1Pa = 7.5 x 10-3Torr
2:Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa.
*1č[šNo cylinder heating.
*2č[šLeak rate doesn't include O-ring permeation rate.
*3č[šAuto switch model: D-A54 (with indicator light, 24 VDC/100 VAC)
CAD data Download
At ULVAC, you can download CAD data (DXF files) for some of our products.(Internet Explorer Ver. 5.5 or newer)
Downloading is only available if you have completed User Registration (free).
Adobe Acrobat Reader (Ver.6 or a later version)is required to open PDF files.
Once we have received your registration, we will send you a password by email.
>> Caution <<
*This download system can be used with the common ID and password for ULVAC's website ulvac.co.jp/eng/.
* If you do not receive your password within 1 hour, please try registering again.
Please note that IDs and passwords are subject to change without notice.
If you are unable to access the download area with an ID and password
that you received in the past, please complete User Registration again to get your updated ID and password.
* Please note that DXF files and PDF files contain Japanese characters. Please also note that, depending on the PC/CAD environment,
files may not open, be displayed or be able to be used correctly.
* Please note that, because the conversion to DXF format is not
fully compatible, there may be problems such as garbled characters or layout misalignments.
* Due to product improvements, CAD data is subject to change without notice.
* ULVAC will not assume any responsibility whatsoever for any direct or indirect damages resulting from the use of this data.
