ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals
VLP-US-KF Series High Vacuum L-Valves (With KF Flanges) With Pneumatic Operation and O-Ring Shaft Seals
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The VLP-US-KF Series are pneumatically-operated high vacuum L-valves developed using ULVAC's wealth of accumulated vacuum technology and experience. The large conductance when the disk is released maximizes vacuum pump specifications such as evacuation performance.
- • O-ring shaft seals draw little air into valves.
• Simpler structure makes maintenance easy.
• Surfaces are polished by electrolysis, for low out gas.
• Low cost
• Use of KF flanges makes piping attachment/removal easy.
- • Evacuation system lines on vacuum equipment
| Model | VLP-US-KF |
| Nominal size A | NW25, 40, 50 |
| Valve material | Stainless steel (*1) |
| Gasket material | Bonnet seal: Nitryl rubber Disk seal: Fluororubbe |
| Permitted baking temperature (ºC) | <120 (*2) |
| Operating pressure range (Pa) | 105 to 10-5 |
| Leak rate (Pa·m3/s) | <7.0 x 10-9 (*3) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Pneumatic operation |
| Compressed air operating pressure (MPa G) | 0.4 to 0.6 |
| OPEN/CLOSE signal output | Can be attached (option). (*4) |
| Back-pressure | Supported as standard feature. |
Note: This catalog uses SI measurement units. Conversion to non-SI units is as follows :
1Pa = 7.5 x 10-3Torr
*1è[š Standard material: SUS 304. SUS304L, SUS316 and SUS316L are available as options
(2-month delivery).
*2è[š Air cylinder: 60ºC max.
*3è[ša,Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.
b,Air adhering to shaft may be drawn in during valve operation,increasing apparent leak rate.
*4è[šAuto switeh model : D-A73
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