ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Pneumatic Operation and O-Ring Shaft Seals
VLP-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Pneumatic Operation and O-Ring Shaft Seals
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The VLP-U and VLP-US Series are pneumatically-operated high vacuum L-valves developed using ULVAC's wealth of accumulated vacuum technology and experience. The large conductance when the disk is released maximizes vacuum pump specifications such as evacuation performance.
- • O-ring shaft seals draw little air into valves.
• Simpler structure makes maintenance easy.
• VLP-US Series models have surfaces polished by electrolysis, for low out gas.
• Low cost
• Wide range of models is available, for small- to large-size connections.
- • Evacuation system lines on vacuum equipment
• Plant equipment requiring ultra-large-size connections (special models can be made to order)
| Model | VLP-U, US |
| Nominal size A (B) | 20A(3/4B) to 900A(36B) |
| Valve material | U : Mild steel; US : Stainless steel (*1) |
| Gasket material | U : Nitryl rubber; US : Fluororubber |
| Permitted baking temperature (ºC) | U : <60, US: <120 (*2) |
| Operating pressure range (Pa) | 105 to 10-5 |
| Leak rate (Pa·m3/s) | U : <1.5 x 10-7, US : <7.0 x 10-9 (*3) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Pneumatic operation |
| Compressed air operating pressure (MPa G) | 0.4 to 0.6 |
| OPEN/CLOSE signal output | Can be connected for sizes up to size 550A (22B) (option) (*4) |
| Back-pressure | Back-pressure is supported as standard feature for sizes from 20A (3/4B) to 100A (4B), and available as option for sizes from 150A (6B) to 900A (36B). |
Noteè[šThis catalog uses SI measurement units. Conversion to non-SI units is as follows :
1Pa = 7.5 x 10-3Torr
*1è[š VLP-US standard material: SUS304. SUS304L, SUS316 and SUS316L are available as options
(2-month delivery).
*2è[š Air cylinder: 60ºC max.
*3è[š a.Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.
b.Air adhering to shaft may be drawn in during valve operation, increasing apparent leak rate.
*4è[š Auto switch models 20A (3/4B) to 100A (4B): D-A73; 120A (6B) to 550A (22B): D-A54
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