ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Manual Operation and O-Ring Shaft Seals
VLH-U/US Series High Vacuum L-Valves (Vacuum Flange Type)With Manual Operation and O-Ring Shaft Seals
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The VLH-U and VLH-US Series are manual high vacuum L-valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- • O-ring shaft seals draw little air into valves.
• Simpler structure makes maintenance easy.
• VLH-US Series models have surfaces polished by electrolysis, for low out gas.
• Low cost
• Wide range of models is available, for small - to large-size connections.
- • Evacuation system lines on vacuum equipment
• Plant equipment requiring ultra-large-size connections (special models can be made to order)
| Model | VLH-U,US |
| Nominal size A (B) | 20A(3/4B) to 250A(10B) |
| Valve material | U : Mild steel; US : Stainless steel (*1) |
| Gasket material | U : Nitryl rubber; US : Fluororubber |
| Permitted baking temperature (ºC) | U : <60, US : <120 |
| Operating pressure range (Pa) | 105 to 10-5 |
| Leak rate (Pa·m3/s) | U : <1.5 x 10-7, US : <7.0 x 10-9 (*2) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Manual |
| Back-pressure | Supported as standard feature. |
Noteè[š This catalog uses SI measurement units. Conversion to non-SI units is as follows:
1 Pa = 7.5 x 10-3 torr
*1è[š VLH-US standard material: SUS304. SUS304L, SUS316 and SUS316L are available as options
(2-month delivery).
*2è[š a.Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.
b.Air adhering to shaft may be drawn in during valve operation,increasing apparent leak rate.
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