ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals
VAH Series High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals
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The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- • O-ring shaft seals draw little air into valves.
• Simpler structure makes maintenance easy.
• Use of aluminum alloy enables more lightweight design.
• Use of link mechanism enables more compact design.
• Low vibrations
• Low cost
- • Evacuation system lines on vacuum equipment
| Model | VAH |
| Nominal size A (B) | 100A(4B), 150A(6B) |
| Valve material | Aluminum alloy (internal parts: mild steel, nickel plating) |
| Gasket material | Nitryl rubber |
| Permitted baking temperature (ºC) | <60 |
| Operating pressure range (Pa) | 105 to 10-5 |
| Leak rate (Pa·m3/s) | <7.0 x 10-9 (*1) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Manual |
| Back-pressure | Supported as standard feature. |
| Remarks | Fluororubber parts are available (option). |
Note:1. This catalog uses SI measurement units. Conversion to non-SI units is as follows:
1 Pa = 7.5 x 10-3 torr
2. Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa.
*1 a. Seal characteristic value in static state. Leak rate doesn't include O-ring permeation rate.
b. Air adhering to shaft may be drawn in during valve operation, increasing apparent leak rate.
