ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals
VULH-CM Series Ultra-High Vacuum L-Valves (Conflat Flange Type) With Manual Operation and Bellows Shaft Seals
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The VULH-CM Series are manual ultra-high vacuum L-valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- • Bellows shaft seals eliminate particles.
• Simpler structure makes maintenance easy.
• Surfaces are polished by electrolysis, for low out gas.
• Low cost
• Enable high-temperature baking.
- • Evacuation system lines on vacuum equipment
| Model | VULH-CM |
| Nominal size A | 15(UFC034) to 150(UFC203) |
| Valve material | Stainless steel |
| Gasket material | Bonnet seal : Silver wire; Disk seal : Fluororubber |
| Permitted baking temperature (ºC) | OPEN : 200/CLOSE : 150 (*1) |
| Operating pressure range (Pa) | 105 to 10-8 |
| Leak rate (Pa·m3/s) | <1.3 x 10-11 (*2) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Manual |
| Back-pressure | Supported as standard feature. |
Noteè[š This catalog uses SI measurement units. Conversion to non-SI units is as follows :
1Pa = 7.5 x 10-3Torr
*1è[š Permitted ambient temperature : 60ºC.
*2è[š Leak rate doesn't include O-ring permeation rate.
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