ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VUGH-F Series Ultra-High Vacuum Gate Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals
VUGH-F Series Ultra-High Vacuum Gate Valves(Vacuum Flange Type)With Manual Operation and Bellows Shaft Seals
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The VUGH-F Series are manual ultra-high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.
- • Bellows shaft seals eliminate particles.
• Simpler structure makes maintenance easy.
• Surfaces are polished by electrolysis, for low out gas.
• Low cost
- • Evacuation system lines on vacuum equipment
| Model | VUGH-F |
| Nominal size A | 40A to 250A |
| Valve material | Valve body, disk: Stainless steel |
| Gasket material | Fluororubber |
| Permitted baking temperature (ºC) | MAX : 150 |
| Operating pressure range (Pa) | 105 to 10-8 |
| Leak rate (Pa·m3/s) | <1.3 x 10-11 (*1) |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Manual |
| Back-pressure | Supported as standard feature. |
Note1: This catalog uses SI measurement units. Conversion to non-SI units is as follows:
1Pa = 7.5 x 10-3Torr
2: Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 1000 Pa.
*1č[šLeak rate doesn't include O-ring permeation rate.
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