10AI Series Manual Ultra-High Vacuum Air Inlet Valves

Model	10AIV	10AIV-FM	10AIV-F
Connection flange (*1)	Diameter: 15	UFC034-FH	UFC070-FH
Valve material	Valve body, disk: Stainless steel
Gasket material	Fluororubber
Permitted baking temperature (ºC)	150 max.
Operating pressure range (Pa)	105 to 10-8
Leak rate (Pa·m3/s)	<6.7 x 10-11 (*2)
Permitted ambient temperature (ºC)	5 to 40
Operation type	Manual
OPEN/CLOSE signal output	Can't be attached.

   Note: 1. This catalog uses SI measurement units. Conversion to non-SI units is as follows:
               1 Pa = 7.5 x 10^-3Torr
            2. Ensure that maximum differential pressure for valve OPEN/CLOSE operations is no more than 100 Pa.

            *1 UFC034-FH and UFC070-FH are ULVAC-standard stainless steel knife-edge metal seal flanges.
            *2 Value doesn't include O-ring permeation.