ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VUH SeriesManual Ultra-High Vacuum Metal Valves(Conflat Flange Type)
VUH SeriesManual Ultra-High Vacuum Metal Valves(Conflat Flange Type)
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| Model | VUH- 10D | VUH- 251C | VUH- 401C | VUH- 651C | |
| Connection flange (*1) | FC034 | FC070 | FC114 | ||
| Valve material | Valve body, bonnet flange, bellows : Austenitic stainless steel | ||||
| Gasket material | Bonnet seal : Gold wire; Disk seal : Copper | ||||
| Permitted baking temperature (ºC) | With valve open : 250; With valve closed: 200 | ||||
| Operating pressure range (Pa) | 105 to 10-9 | ||||
| Leak rate (Pa·m3/s) | <1.3 x 10-11 | ||||
| Permitted ambient temperature (ºC) | 5 to 40 | ||||
| Operation type | Manual | ||||
| Seal torque (N·m) (*2) | Initial | 4.9 | 14.7 | ||
| Maximum | 29.4 | 44.1 | |||
| Bellows life | 10,000 operations min. | ||||
| Nose life at room temperature (reference value) (*3, *4) | (300) | (350) | (300) | (250) | |
Note: This catalog uses SI measurement units. Conversion to non-SI units is as follows :
1Pa = 7.5 x 10-3Torr
*1 ULVAC-standard stainless steel knife-edge metal seal flanges
*2 A torque wrench is required to tighten the valve. You will need a 45 N·m (450 kg·cm)
preset torque wrench and socket with a nominal diameter of 24.
*3 The actual life will depend on a variety of indeterminate factors such as the operating environment and conditions.
The valve has exceeded its service life when it can no longer be sealed with a sealing torque value between the
initial and maximum values (value required increases with valve age).
The valve should be replaced at this time. Note that performing bake-out may decrease valve life.
*4 To replace the nose, contact an ULVAC sales office or dealer.
The VUH-10D model is welded, so the nose can't be replaced.
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