ULVAC VACUUM > Other Vacuum Parts > Vacuum Valves > VUH-MVF Manual Ultra-High Vacuum Mini Valve(Conflat Flange Type)
VUH-MVF Manual Ultra-High Vacuum Mini Valve(Conflat Flange Type)
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| Model | VUH-MVF |
| Connection flange (*1) | UFC034 |
| Valve material | Valve body, bonnet flange, bellows : Austenitic stainless steel |
| Gasket material | Disk seal : Polyimide resin (*2) |
| Permitted baking temperature (ºC) | 200 max. |
| Operating pressure range (Pa) | 105 to 10-8 |
| Leak rate (Pa·m3/s) | <6.7 x 10-11 (*3) |
| Bellows life | 10,000 operations min. |
| Permitted ambient temperature (ºC) | 5 to 40 |
| Operation type | Manual |
Note: This catalog uses SI measurement units. Conversion to non-SI units is as follows:
1Pa = 7.5 x 10-3Torr
*1 ULVAC-standard stainless steel knife-edge metal seal flange
*2 This valve is welded, so its disk seal can't be replaced.
*3 Value doesn't include polyimide resin permeation.
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