ULVAC VACUUM > Vacuum Gauges > Pirani Gauges > G-Tran Series Pirani Gauge Measuring Units
G-Tran Series Pirani Gauge Measuring Units
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The G-Tran Series contains two Pirani gauge measuring units: a sensor unit (SP1) and box unit (BPR2). The sensor unit has an integrated gauge head and circuit (with a replaceable gauge head). The box unit has a separate gauge head and circuit, enabling gauge head baking. It also comes with an RS-485 interface.
- • Output of analog signals and set points (2 points)
• Pseudo-logarithmic output (box unit only)
• RS-485 communication (supports multi-drop; box unit only)
• Gauge head can be easily replaced, and is interchangeable with previous-model gauge heads.
• Enables gauge head baking (box unit only).
- • Process control for equipment for manufacturing semiconductors or other electronic parts
• Process control for furnaces and other industrial equipment
• Process control for manufacturing equipment with several process chambers (such as inline or single-wafer systems)
| Name | Sensor unit | Box unit |
| Model | SP1 | BPR2 |
| Compatible gauge heads | WP - 01, 02, 03, 16 | WP - 01, 02, 03, 16, WPB - 10 |
| Measured pressure range (Pa) | 4.0 x 10-1 to 3.0 x 10+3 | |
| Measurement precision | ±15% (51 to 760Pa) ±30% (10 to 1000Pa) ±50% (0.4 to 3000Pa) |
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| Operating temperature range (ºC) | 10 to 40 | |
| Recorder output | Non-linear output : 0 to 5 VDC (MAX.10VDC) | |
| - | Pseudo-logarithmic output: 0 to 10 VDC (1 V linear output for each digit) |
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| Control output signal (open collector) | ERROR signal, set points 1/2 | |
| LED display | Power, error, set points 1/2 | |
| Communication type | - | RS-485 |
| Power supply | DC24V±2V, 90mA(MAX) |
DC24V±2V, 50mA(MAX) |
| I/O connector | D-sub, 15 sockets, M2.6 screw | |
| Measuring unit weight (g) excluding sensor head |
190 | 270 |
| Options | Gauge head | |
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