ULVAC VACUUM > Vacuum Pumps > Mechanical Booster Pumps > PRC-A Series Mechanical Booster Pumps
PRC-A Series Mechanical Booster Pumps
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The PRC-A Series are improved versions of ULVAC's long-used PMB-003C(M), PMB-006C(M) and PMB-012C(M) models. They have the same evacuation performance with lower noise and greater reliability, and are ideal for use in the dust-sensitive environments required for clean rooms for semiconductor and LC manufacturing processes. The PRC-A Series are Roots pumps designed mainly for processes requiring highly clean atmospheres. They can be used with auxiliary pumps, to increase the evacuation speed in the 10 kPa to 1 Pa range.
- • No oil leakage outside pump.
Use of canned motors eliminates mechanical seals and completely eliminates oil leakage outside pump. No contamination of ambient environment.
• Low noise
Use of canned motors eliminates wind noise from air-cooling fans for general-purpose motors, enabling low noise levels.
• Oil-free
No lubrication oil in casing chamber, enabling stable performance for water vapor or solvent vapor.
• Outstanding corrosion resistance
Major components are Tufram®-processed, for high surface hardness and outstanding corrosion resistance. Tufram®-processed components reduce damage and corrosion inside pump.
• Atmospheric pressure driven model is available (option), effective at reducing evacuation time
Use of inverter enables operation with intake pressure starting from atmospheric pressure. Can be started at same time as rough evacuation pump, enabling faster evacuation than standard types.
| Model
Item |
PRC-003A | PRC-006A | PRC-012A | ||
| Effective evacuation speed (m3/h (l/min)) (*1) |
50Hz | 330 | 520 | 930 | |
| 60Hz | 330 | 630 | 1000 | ||
| Final pressure (Pa) (*2) | 6.7 x10-1 | ||||
| Auxiliary pump | LR/HR60 | LR/HR90 | LR/HR90 | ||
| Maximum intake pressure (Pa) (except atmospheric pressure driven models) | 50Hz | 1.2 x 103 | 1.3 x 103 | 1.3 x 103 | |
| 60Hz | 9.3 x 102 | 1.1 x 103 | 1.1 x 103 | ||
| Maximum permitted pressure difference (Pa) (except atmospheric pressure driven models) | 50Hz | 4.0 x 103 | 7.3 x 103 | 7.3 x 103 | |
| 60Hz | 3.3 x 103 | 6.0 x 103 | 6.0 x 103 | ||
| Supported drive pressure (Pa) | Up to 1.0 x 105 (atmospheric pressure driven models only) | ||||
| Motor power (kW) (number of poles) (*3) | 0.75(2) | 2.2(2) | 3.7(2) | ||
| Oil (*4) | ULVOIL® R-4 or FOMBLIN® Y-L VAC 14/6 |
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| Required oil amount (l) | 0.7 | 1.5 | 1.9 | ||
| Cooling water | Cooling method | Water-cooled | |||
| Primary pressure (MPa) | 0.1 to 0.3 | ||||
| Outlet/inlet differential pressure (MPa) | 0.1< | ||||
| Flow rate (l/min) | 2.0< | 3.0< | |||
| Temperature (ºC) | 5 to 30 | ||||
| Intake size (JIS B 2290) | VG80 size | VG100 size | |||
| Vent size (JIS B 2290) | VF80 size | ||||
| External dimensions (L x W x H) (*5) | 296 x 565 x 260 | 356 x 619 x 320 | 406 x 759 x 340 | ||
| External dimensions of atmospheric pressure driven models | 296 x 651 x 260 | 366 x 740 x 320 | 426 x 911 x 340 | ||
| Weight (kg) (*6) | 51(54) | 86(90) | 118(123) | ||
Note : This catalog uses SI measurement units. Conversion to non-SI units is as follows.
Final pressure : 6.7 x 10-1 Pa = 5.0 x 10-3 torr
Pressure : 0.1/0.2/0.3 MPa = 1/2/3 kgf/cm2
*1 Measured value at 13 Pa (Atmospheric pressure driven model)
*2 Measured by Pirani vacuum gauge (standard auxiliary pump and oil)
*3 200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*4 When ordering oil, specify the type. Pump oil types other than the standard type are available. Contact ULVAC.
*5 W = width, D = depth, H = height
*6 Oil volume values in parentheses ( ) : For atmospheric pressure driven models
* Not available as explosion-proof type or increased safety type.
