ULVAC VACUUM > Vacuum Pumps > Turbo Molecular Pumps > UTM Series Pivot Bearing Type Turbo Molecular Pumps
UTM Series Pivot Bearing Type Turbo Molecular Pumps
ULVAC's UTM Series of turbo molecular pumps use high-performance bearings unlike those in common use, enabling outstanding features.
- • Non-contact magnetic bearings in the top (using permanent magnets) and pivot bearings in the bottom (using fluorine oil) completely eliminate mechanical contact during high-speed rotation.
•Don't require time-consuming oil changes or bearing replacements, enabling long bearing life.
•Use fluorine-based oil with saturation vapor pressure of around 10-11Pa (at 20ºC), so atmosphere stays completely oil-free.
Fine dynamic balance rotor and high-performance bearings enable high-speed rotation.
•Enables high compression ratio for hydrogen, helium and other gases with low molecular weights.
•Fine dynamic balance rotor and high-performance bearings enable surprisingly low noise and vibrations.
- •Evacuation of analysis equipment
•As rough vacuum pumps for accelerators and beam lines
•High-vacuum evacuation of laboratory equipment
| Model | UTM -50 |
UTM -150 |
UTM -300 |
UTM -500 |
UTM -1500 |
|
| Inlet flange size | CF | CF114 | CF152 | CF203 | CF305 | |
| JIS VG | 65 | 100 | 150 | 250 | ||
| Outlet flange size | NW16 | NW25 | NW40 | JIS VF50 | ||
| Pumping speed (l/s) (*1, *2) |
N2 | 50 | 190 | 300 | 550 | 1600 |
| H2 | 40 | 160 | 260 | 500 | 1650 | |
| Maximum compression ratio (*1, *3) |
N2 | 108 | ||||
| H2 | 103 | 104 | ||||
| Ultimate pressure (Pa) (*1, *3) |
10-7 | 10-8 | ||||
| Bearing type | Top | Permanent magnet bearings | ||||
| Bottom | Pivot bearings | |||||
| Cooling method | Air-cooled/water-cooled | |||||
*1 Value measured in accordance with JVIS005 standard, or calculated value based on it
*2 Evacuation speed values are values when protective mesh isn't used.
*3 Values given are orders of magnitude.
CAD data Download
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