ULVAC VACUUM > Gas analyzers > Gas analyzers > REPROS Process Monitors for Reaction Gas

REPROS Process Monitors for Reaction Gas

The REPROS systems are process monitors used with reactive processes such as etching and CVD. They supply and analyze process chamber gas using a mass filter gas analyzer and differential evacuation system. REPROS models have outstanding corrosion resistance, and enable stable measurements over extended periods. Their ion sources have low thermal reactivity and molecular breakdown, enabling accurate monitoring of process reactions.

• Stable measurements in reactive processes for extended periods

• Original high-sensitivity closed ion source prevents breakdown due to ionization, and breakdown and adsorption due to thermal reaction.

• Compact duct control valve minimizes the distance to the process chamber, enabling quick-response analysis.

• Measurement under wide range of pressures (10-6 to 13kPa)

• Compact and lightweight design makes attachment to process chamber easy.

• Monitoring reaction gases in processes

• End point monitoring of etching and cleaning processes

• Residual gas measurement

• Leak Tests

Model	RE-201P	RE-202P	RE-402P
Measured atomic mass number range (amu)	2 to 200		2 to 400
Resolution	M/ΔM=1M(10%P.H.)
Sensitivity Direct supply (A/Pa) Orifice supply	1 x 10^-7 1 x 10^-6	1 x 10^-3 1 x 10^-2
Minimum detection partial pressure (Pa)	5 x 10^-8	1 x 10^-10
Ion source	Closed ion source with magnet
Filament	V-shaped Ir/Y₂O₃ (x 1)
Ionization voltage (eV)	20 to 70
Amp range (A)	1 x 10^-8 to 1 x 10^-11	1 x 10^-5 to 1 x 10^-11
Detector	Faraday cup	Secondary electron multiplier/Faraday cup	Secondary electron multiplier
Maximum bake temperature (ºC)	120
Gas supply valve	Duct control valve with orifice
Maximum sampling pressure (kPa)	13
PC interface	RS-232C/485
External I/O	Analog inputs (x 2), set point outputs (x 2)
Software	QMS Control System 2001
Utilities	Power supply voltage : 100 VAC, 10 A ; Dry N₂ : 0.4 to 0.7 MPa
Options	Height adjustment stand, baking heater, gas supply valve, RS-232C/485 converter, ionization vacuum gauge, Pirani vacuum gauge, forepump, host communication software (SECS/GEM), data processing software (Origin-QCS)