ULVAC VACUUM > Gas analyzers > Gas analyzers > Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM

Residual Gas Analysis/Process Gas Monitor High Performance Process Gas Monitor Qulee HGM

	PDFCatalogue Qulee HGM (1.2Mb)[PDF]
	PDFCatalogue Qulee series Option (528K) [PDF]

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ULVAC's new residual gas analyzer QULEE series, with revolutionary simplicity and usability, now offers a high-end model "QULEE HGM". Achieving highest sensitivity among all models at 2.5 x 10^-6 A/Pa, QULEE HGM can meet the needs in various R&D and other vacuum system process monitoring.

• Achieved highest senstivity 2.5 x 10^-6 A/Pa(Ie=1mA)

• Max. 250ºC High temperature baking while connecting the sensor.

• Display integrated design

• Simple operation-"One Click" function

• Total pressure measurement

• Qulee QCS Software is included

• CE MARKING

• RoHS Compliance

• Various types of gas analysis for research and development.

• Residual gas analysis for ultra high vacuum pumping equipment, etc.

• Residual gas analysis in PVD system and vacuum deposition.

• R&D for Photo voltaic field.

Item	Qulee HGM
Model no.	HGM-202		HGM-302
Mass Filter Type	Quadrupole
Mass Range	1-200 amu		1-300 amu
Resolution	M/ΔM=1M(10% P.H.)
Detector Type	Faraday Cup	SEM	Faraday Cup	SEM
Sensitivity	2.5 x 10^-6 A/Pa	4A/Pa	2.0 x 10^-6 A/Pa	4A/Pa
Minimum Detectable Partial Pressure	10^-9Pa Level	10^-13Pa Level	10^-9Pa Level	10^-13Pa Level
Maximum Operating Pressure	1x10^-2Pa
Toatal Puresure Function	capable
One Click function	capable/He/H₂O/N₂/O₂/Any Gas
One Click Leak Test function	capable
Power Input	DC24V
Maximum Sensor Operating Temperature	250ºC
Maximum Bakeout Temperature (electronics removed)	300ºC
Operating Temperature	10 - 40ºC
Standard Software	Qulee QCS (Windows 2000/XP/Vista)
CE MARKING	Compliance