ULVAC VACUUM > Leak detectors > Leak detectors > Leak Tester HELIOT model 103
Leak Tester HELIOT model 103
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When performing vacuum method leak tests on equipment such as large chambers or long piping, the detector often can't provide sufficient pump evacuation capacity by itself. In this case, the equipment being tested must be evacuated by its own evacuation system or by a separate evacuation system. HELIOT model 103 is a leak tester for equipment maintenance using the vacuum method. It does away with inadequate rough evacuation pumps, and offers high-precision testing in a compact/space-saving, low-cost design.
- • Use of helium gas for electrical measurement enables leak tests with high precision, stability and reproducibility.
• Eliminates need for wasteful rough evacuation pumps, with compact/lightweight design that fits in palm of hand.
• Touch-panel display is easy to operate and read, and can be switched between Japanese (with kanji) and English characters.
• Measures pressure of test item, and automatically controls test valve's OPEN/CLOSE status.
• Dry pump type is available (comes with built-in membrane pump).
- • High-precision quantitative tests replacing vacuum shelf test method : Equipment assembly and maintenance for semiconductor industry, etc.
• System management tests for individual processes : Chamber OPEN/CLOSE checking, leak test automation for individual batches
• Mobility tests replacing conventional vacuum method tests : Large equipment movement tests, field service, etc.
| Model overview | Maintenance type |
| Sensitivity (Pa·m3/s) | 10-9 to 10-4Pa·m3/s |
| Units | Pa·m3/s, mbar·L/s |
| Main pump/fore pump | Compound molecular pump/membrane pump |
| Sniffer pump | Membrane pump |
| Analyzer tube | Magnetic field deflection mass spectrometer tube |
| Operation | (1) Fully automatic startup (including sensitivity calibration) (*1) (2) Automatic valve operation (3) Calibration leak automatic temperature compensation (4) Quick startup function (5) Zero tracking function (6) Self-check function |
| Leak rate display | Touch-panel display : Digital value readout display (Japanese kanji or English can be selected.) : Analog display (chart/graph display) |
| Leak rate alarm | Audio alarm is provided standard. |
| I/O | RS-232C |
| Printer (Centronics interface) | |
| Recorder (Linear : 0 to 10 VDC with range output; Analog : 0 to 10 VDC) |
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| External control I/O (device start/stop, test start/end, set points, etc.) | |
| Power supply | AC100V 150W standard |
| Safety standard | CE |
| External dimensions, weight | 260 x 480 x 260mm, 14.5kg |
*1 Sensitivity calibration is performed by internal calibration leak.
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