ULVAC VACUUM > Film Thickness Measurement > Quatz Crystal Deposition controller > CRTM-9000G Quartz Crystal Deposition Controller
CRTM-9000G Quartz Crystal Deposition Controller
CRTM-9000G is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.005Å ). An option enables deposition control for up to 4 materials simultaneously.
- • Ideal for low-rate deposition control with outstanding film thickness/rate resolution (0.005Å).
• Deposition control for 4 materials simultaneously (with option).
• Control of multilayer films with up to 99 layers.
• Programs can be saved on USB memory and floppy disks.
• Can measure film thicknesses accurately, referencing history of films deposited on crystal oscillator (MLC function).
- • Film thickness and rate control at Evaporation
| Film thickness/rate resolution | 0.00550 Å (5 MHz crystal) 0.00381 Å (6 MHz crystal) |
| Film thickness display range/display resolution | 0.001kÅ to 999.9kÅ /1Å |
| Deposition rate display range/display resolution | 0.001 to 999.9Å/s / 0.001Å/s |
| Supported sensor frequency | 5MHz, 6MHz |
| Number of sensors that can be attached | 2 (up to 8 with option) |
| Sampling rate | 250ms |
| Number of multilayer film layers supported | 99layers |
| Number of deposition programs | 128 |
| Digital I/O | input : 12 channels programmable output : 16 channels programmable |
| Analog outputs | POWER (0 to 0.99 V) (RATE and THK are option.) |
| External dimensions (W x D x H; mm) |
480 x 353 x 149 |
