ULVAC VACUUM > Film Thickness Measurement > Quatz Crystal Deposition controller > CRTS-12NS Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
CRTS-12NS Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
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The rotary type multi-sensor "CRTS-12NS" has developed for the crystal oscillation type deposition controller "CRTM-6000 and 9000" . The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
- • Since 5MHz AT cut crystal can be mountable in 12 pieces.
• Having adopted a vacuum stepping motor in the drive section, this is designed to focus on reliability and durability in top priority, including precisely controlling the stop position of the crystal too.
• The replacement of crystal is detachable together with the crystal holder.
• In case the life of crystal (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
- • High rate, multi-layer deposition control for Optical, OrganicEL, Electric devices.
| Sensor head | |
| Equipped crystal number | 12 pieces |
| Capacity of crystal | 5MHz AT cut crystal |
| Heat resistance temperature | 350C° |
| Cooling water volume | 1L / min |
| Weight | 2kg |
| Dimension (mm) | φ104mm x 59mm |
| Controller | |
| Digital input | INIT, CNT, STOP, INTER L |
| Digital output | SENSOR NO., BUSY, ERROR, RETRY, END |
| Utility | DC24V, 3.0A |
| Dimension | 100(W) x 250(D) x 99(H) |
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